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Deposition of polycrystalline AIN thin films by coherent magnetron sputtering at temperatures

✍ Scribed by A. K. Chu; C. H. Chao; F. Z. Lee; H. L. Huang

Book ID
107452706
Publisher
Springer US
Year
2001
Tongue
English
Weight
256 KB
Volume
30
Category
Article
ISSN
0361-5235

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## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al