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Damage Profiles in Ion Implanted Silicon

✍ Scribed by Tkachev, V. D. ;Hölzer, G. ;Chelyadinskii, A. R.

Publisher: John Wiley and Sons
Year: 1984
Tongue: English
Weight: 185 KB
Volume: 85
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210850148

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