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Damage and substitution anomalies for MeV Sb implantation in Si(1 0 0) after high-energy irradiation

✍ Scribed by Soma Dey; Shikha Varma

No coin nor oath required. For personal study only.

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Damage and substitution anomalies for MeV Sb implantation in Si(1&#xa0;0&#xa0;0) after high-energy irradiation