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Effects of H+, Ar+, and self-ion-irradiation on secondary defects in MeV P+-implanted Si(1 0 0)

✍ Scribed by Renhe Tian

Book ID: 114171649
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 460 KB
Volume: 160
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(99)00613-8

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