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Effects of MeV Si ion irradiation on the properties of shallow P + N junctions

✍ Scribed by Zhong-Lie Wang; Qing-Tai Zhao; Meiya Li; Xinjun Gong

No coin nor oath required. For personal study only.

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Effects of MeV Si ion irradiation on the properties of shallow P&#xa0;+&#xa0;N junctions