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Range profiles and lattice location of MeV implant of Sb in Si (1 0 0)

โœ Scribed by S Dey; G Kuri; B Rout; S Varma


Book ID
114170223
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
174 KB
Volume
142
Category
Article
ISSN
0168-583X

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