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Cylindrical DC Magnetron Sputtering Assisted by Microwave Plasma

✍ Scribed by Yonesu, Akira; Kato, Takashi; Takemoto, Hiroki; Nishimura, Naoki; Yamashiro, Yasumasa

Book ID
124161626
Publisher
Institute of Pure and Applied Physics
Year
1999
Tongue
English
Weight
366 KB
Volume
38
Category
Article
ISSN
0021-4922

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