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CrB2 coatings deposited by inductively coupled plasma assisted DC magnetron sputtering

✍ Scribed by H.S. Choi; B. Park; J.J. Lee

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 896 KB
Volume: 202
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2007.06.020

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✦ Synopsis

CrB 2 coatings were synthesized on high speed steel (HSS) substrates using inductively coupled plasma (ICP) assisted DC magnetron sputtering, and the structure and properties of the CrB 2 coating produced at different ICP powers and substrate biases were investigated. The hardness of the CrB 2 coatings increased from 30 GPa to 54 GPa by increasing the ICP power as well as the negative substrate bias. By increasing ICP power, the preferred orientation of the CrB 2 coating changed from ( 101) to (001). The CrB 2 coating showed excellent corrosion resistance. The corrosion resistance of the CrB 2 coatings was also found to be much better than that of the TiB 2 coatings. The adhesion strength of the film could be improved considerably after ICP nitriding of the substrate.

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