Comparison of CxNy:H films obtained by deposition using magnetron sputtering or an inductively coupled plasma

✍ Scribed by D. A. Zeze; D. R. North; N. M. D. Brown; C. A. Anderson

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 399 KB
• Volume: 29
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/1096-9918(200006)29:6<369::aid-sia878>3.0.co;2-d