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Microwave plasma assisted sputtering

✍ Scribed by R. Latz; C. Daube; T. Haranou; B. Ocker; K. Suzuki

Book ID: 117148489
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 600 KB
Volume: 218
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(97)00295-0

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