✦ LIBER ✦
Preparation of SiCN crystals using microwave plasma CVD assisted by pulsed nitrogen ion beam sputtering
✍ Scribed by Jun Wan; Zhi-bin Ma; Hong Cao; Zhen-hui Wu; Jian-hua Wang
- Book ID
- 104009046
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 50 KB
- Volume
- 48
- Category
- Article
- ISSN
- 0008-6223
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