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CVD of Zr0.65Ti0.35O2 Thin Films Using a Single-Source Precursor of Novel Anhydrous Mixed-Metal Nitrates

✍ Scribed by Q. Shao; A. Li; W. Zhang; D. Wu; Z. Liu; N. Ming

Publisher: John Wiley and Sons
Year: 2006
Tongue: English
Weight: 882 KB
Volume: 12
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200506480

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