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Cross-polarization imaging and micro-raman detection of defects in the epitaxy of 4H-SiC

✍ Scribed by O. J. Glembocki; S. M. Prokes; R. E. Stahlbush; M. F. Macmillan

Book ID: 107453407
Publisher: Springer US
Year: 2005
Tongue: English
Weight: 439 KB
Volume: 34
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-005-0115-4

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