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Controversies in the suggested mechanisms of plasma-induced deposition of silicon from silane

✍ Scribed by Stan Veprˇek

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 145 KB
Volume: 175
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(89)90819-5

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