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Comb-drive actuators for large displacements

✍ Scribed by Legtenberg, Rob; Groeneveld, A W; Elwenspoek, M

Book ID
120294469
Publisher
Institute of Physics
Year
1996
Tongue
English
Weight
291 KB
Volume
6
Category
Article
ISSN
0960-1317

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πŸ“œ SIMILAR VOLUMES

Levitation compensation method for dynam
Levitation compensation method for dynamic electrostatic comb-drive actuators
✍ S.J. Timpe; D.A. Hook; M.T. Dugger; K. Komvopoulos πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 680 KB

An analytical method was developed for maintaining a constant levitation height during dynamic operation of reciprocating comb-drive actuators. The dependence of the translational position and the levitation height on the applied voltage was used to design waveforms that maintain a given translation