✦ LIBER ✦
Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms
✍ Scribed by D. Kamiya; T. Hayama; M. Horie
- Publisher
- Springer-Verlag
- Year
- 1999
- Tongue
- English
- Weight
- 314 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0946-7076
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