A rotary comb-actuated microgripper with a large displacement range
✍ Scribed by Honglong Chang, Haitao Zhao, Fang Ye, Guangmin Yuan…
- Book ID
- 120914893
- Publisher
- Springer-Verlag
- Year
- 2013
- Tongue
- English
- Weight
- 970 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0946-7076
No coin nor oath required. For personal study only.
📜 SIMILAR VOLUMES
In this paper, the displacement of an object is measured with a photothermal phase-modulating laser diode interferometer. A feedback control system is designed to reduce the measurement errors caused by the uctuations in the optical wavelength of the laser diode and the vibrations of the optical com
## Abstract A novel metal micromachining technique is presented, with which both area‐tuning and gap‐tuning variable capacitors are designed and fabricated. Mainly comprising nickel electroplating and gaseous isotropic etching, the developed micromachining technique can be processed in low resistiv