✦ LIBER ✦
A single crystal silicon 3 dimensional processing technique with applications in large displacement electrostatic actuation
✍ Scribed by K. Subramanian; X. T. Huang; N. C. MacDonald
- Book ID
- 106184474
- Publisher
- Springer-Verlag
- Year
- 2002
- Tongue
- English
- Weight
- 203 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0946-7076
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