A large-displacement CMOS micromachined thermal actuator with comb electrodes for capacitive sensing

✍ Scribed by Li-Sheng Zheng; Michael S.-C. Lu

• Book ID: 108262844
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 988 KB
• Volume: 136
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/j.sna.2007.01.006