Extending displacements of comb drive actuators by adding secondary comb electrodes

✍ Scribed by Hou, Max Ti-Kuang; Huang, Gordon Kou-Wei; Huang, Jing-Yi; Liao, Ke-Min; Chen, Rongshun; Yeh, Jer-Liang Andrew

• Book ID: 120192931
• Publisher: Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 688 KB
• Volume: 16
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/16/4/003