✦ LIBER ✦
Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators
✍ Scribed by Zhou, Guangya; Dowd, Philip
- Book ID
- 121225773
- Publisher
- Institute of Physics
- Year
- 2002
- Tongue
- English
- Weight
- 300 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0960-1317
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