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Note: An asymmetric flexure mechanism for comb-drive actuators

✍ Scribed by Olfatnia, M.; Sood, S.; Awtar, S.

Book ID: 120194345
Publisher: American Institute of Physics
Year: 2012
Tongue: English
Weight: 912 KB
Volume: 83
Category: Article
ISSN: 0034-6748
DOI: 10.1063/1.4767242

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