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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Evaluation of comb-drive nickel micromirror for fiber optical communication

✍ Scribed by Akimoto, K.; Uenishi, Y.; Honma, K.; Nagaoka, S.

Book ID: 120646757
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 556 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581768

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