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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Miniature wishbone interferometer using rotary comb drive actuator for environment gas monitoring

✍ Scribed by Lee, Young-min; Toda, Masaya; Esashi, Masayoshi; Ono, Takahito

Book ID: 121308669
Publisher: IEEE
Year: 2011
Weight: 747 KB
Category: Article
ISBN: 1424496322
DOI: 10.1109/MEMSYS.2011.5734525

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