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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Real-time monitoring of Ca

✍ Scribed by Kitazawa, Yuko; Yokokawa, Ryuji; Terao, Kyohei; Okonogi, Atsuhito; Dao, Dzung Viet; Sugiyama, Susumu; Kanno, Isaku; Kotera, Hidetoshi

Book ID: 121314842
Publisher: IEEE
Year: 2011
Weight: 1009 KB
Category: Article
ISBN: 1424496322
DOI: 10.1109/MEMSYS.2011.5734585

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