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ChemInform Abstract: Metalorganic Chemical Vapor Deposition of Indium Selenide Thin Films.

✍ Scribed by S. L. STOLL; A. R. BARRON

Publisher
John Wiley and Sons
Year
2010
Weight
33 KB
Volume
29
Category
Article
ISSN
0931-7597

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✦ Synopsis

InSe films are grown at 230-420 β€’ C by low-pressure MOCVD from [(tBu) 2 In(Β΅-SetBu)] 2 and [(Me 2 EtC)In(Β΅ 3 -Se)] 4 . Energy-dispersive X-ray analysis shows that films grown from the first precursor are In rich, while those from the second one are stoichiometric InSe. At temperatures Β‘ 330 β€’ C ball-like morphologies are observed, while deposition at 350-370 β€’ C results in highly crystalline textured films.

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