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Chemical Vapor Deposition of TiN from Tetrakis(dimethylamido)titanium and Ammonia: Kinetics and Mechanistic Studies of the Gas-Phase Chemistry

✍ Scribed by Weiller, Bruce H.

Book ID: 126966469
Publisher: American Chemical Society
Year: 1996
Tongue: English
Weight: 244 KB
Volume: 118
Category: Article
ISSN: 0002-7863
DOI: 10.1021/ja953468o

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