Dimethylamine Inhibits the Reaction of Tetrakis(dimethylamido)titanium with Ammonia: Implications for the Chemical Vapor Deposition of TiN and Other Nitrides

✍ Scribed by Weiller, Bruce H.

• Book ID: 126300813
• Publisher: American Chemical Society
• Year: 1995
• Tongue: English
• Weight: 947 KB
• Volume: 7
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm00057a005