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Low Temperature Chemical Vapor Deposition of Titanium Nitride Thin Films with Hydrazine and Tetrakis(dimethylamido)titanium

✍ Scribed by Amato-Wierda, Carmela

Book ID: 115522249
Publisher: The Electrochemical Society
Year: 1999
Tongue: English
Weight: 87 KB
Volume: 2
Category: Article
ISSN: 1099-0062
DOI: 10.1149/1.1390924

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