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Chemical vapor deposition of titanium nitride at low temperatures

✍ Scribed by S.R. Kurtz; R.G. Gordon

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 760 KB
Volume: 140
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(86)90271-3

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