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Kinetic and Mechanistic Studies of the Chemical Vapor Deposition of Tungsten Nitride from Bis(Tertbutylimido)Bis(Tertbutylamido)Tungsten

โœ Scribed by Crane, Elizabeth L.; Chiu, Hsin-Tien; Nuzzo, Ralph G.


Book ID
127237490
Publisher
American Chemical Society
Year
2001
Tongue
English
Weight
116 KB
Volume
105
Category
Article
ISSN
0022-3654

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