Homogeneous Decomposition of Aryl- and Alkylimido Precursors for the Chemical Vapor Deposition of Tungsten Nitride: A Combined Density Functional Theory and Experimental Study

✍ Scribed by Won, Yong Sun; Kim, Young Seok; Anderson, Timothy J.; Reitfort, Laurel L.; Ghiviriga, Ion; McElwee-White, Lisa

• Book ID: 126833042
• Publisher: American Chemical Society
• Year: 2006
• Tongue: English
• Weight: 406 KB
• Volume: 128
• Category: Article
• ISSN: 0002-7863
• DOI: 10.1021/ja0621804