✦ LIBER ✦
Hot wire chemical vapor deposition: limits and opportunities of protecting the tungsten catalyzer from silicide with a cavity
✍ Scribed by P.A. Frigeri; O. Nos; S. Bengoechea; C. Frevert; J.M. Asensi; J. Bertomeu
- Book ID
- 108290357
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 584 KB
- Volume
- 517
- Category
- Article
- ISSN
- 0040-6090
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