✦ LIBER ✦
In Situ XPS Studies of the Deposition of TiN x C y Films from Tetrakis(dimethylamido)titanium(IV) and Bis[ N , N ‘-bis( tert -butyl)ethylenediamido]titanium(IV)
✍ Scribed by Ruhl, G.; Rehmet, R.; Knižová, M.; Merica, R.; Vepřek, S.
- Book ID
- 127083716
- Publisher
- American Chemical Society
- Year
- 1996
- Tongue
- English
- Weight
- 444 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0897-4756
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