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Chemical and structural transformation of sapphire (Al[sub 2]O[sub 3]) surface by plasma source nitridation

✍ Scribed by Cho, Y.; Kim, Y.; Weber, E. R.; Ruvimov, S.; Liliental-Weber, Z.

Book ID: 120052268
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 688 KB
Volume: 85
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.370606

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