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Change in the chemical state and thermal stability of HfO[sub 2] by the incorporation of Al[sub 2]O[sub 3]

✍ Scribed by Cho, M.-H.; Chang, H. S.; Cho, Y. J.; Moon, D. W.; Min, K.-H.; Sinclair, R.; Kang, S. K.; Ko, D.-H.; Lee, J. H.; Gu, J. H.

Book ID: 127221779
Publisher: American Institute of Physics
Year: 2004
Tongue: English
Weight: 586 KB
Volume: 84
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1633976

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