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Wet Chemical and Plasma Etching of Ga[sub 2]O[sub 3](Gd[sub 2]O[sub 3])

✍ Scribed by Ren, F.

Book ID: 119962982
Publisher: The Electrochemical Society
Year: 1997
Tongue: English
Weight: 867 KB
Volume: 144
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.1837929

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