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Plasma cleaning and nitridation of sapphire (α-Al[sub 2]O[sub 3]) surfaces: New evidence from in situ real time ellipsometry
✍ Scribed by Losurdo, M.; Capezzuto, P.; Bruno, G.
- Book ID
- 120015546
- Publisher
- American Institute of Physics
- Year
- 2000
- Tongue
- English
- Weight
- 418 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0021-8979
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