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Characterization of TiN thin films grown by low-frequency (60 Hz) plasma enhanced chemical vapor deposition

✍ Scribed by Hong Tak Kim; Maeng Jun Kim; Sang Ho Sohn

Book ID: 113743613
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 732 KB
Volume: 73
Category: Article
ISSN: 0022-3697
DOI: 10.1016/j.jpcs.2012.02.024

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Characterization of TiN thin films grown by low-frequency (60&#xa0;Hz) plasma enhanced chemical vapor deposition

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