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Characterization of the implantation damage in SiO2 with x-ray photoelectron spectroscopy

โœ Scribed by Ajioka, Tsuneo; Ushio, Shintaro

Book ID
121795057
Publisher
American Institute of Physics
Year
1986
Tongue
English
Weight
393 KB
Volume
48
Category
Article
ISSN
0003-6951

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