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A study on Si nanocrystal formation in Si-implanted SiO 2 films by x-ray photoelectron spectroscopy

✍ Scribed by Liu, Y; Chen, T P; Fu, Y Q; Tse, M S; Hsieh, J H; Ho, P F; Liu, Y C


Book ID
121867952
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
113 KB
Volume
36
Category
Article
ISSN
0022-3727

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