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Silicate layer formation at HfO2/SiO2/Si interface determined by x-ray photoelectron spectroscopy and infrared spectroscopy

โœ Scribed by G. He; L. D. Zhang; Q. Fang


Book ID
124154361
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
103 KB
Volume
100
Category
Article
ISSN
0021-8979

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