X-ray and infrared spectroscopy of layers produced by cosputtering of spatially separated SiO2and Si sources

✍ Scribed by S. N. Shamin; V. R. Galakhov; V. I. Aksenova; A. N. Karpov; N. L. Shvartz; Z. Sh. Yanovitskaya; V. A. Volodin; I. V. Antonova; T. B. Ezhevskaya; J. Jedrzejewski; E. Savir; I. Balberg

• Book ID: 111444612
• Publisher: Springer
• Year: 2010
• Tongue: English
• Weight: 215 KB
• Volume: 44
• Category: Article
• ISSN: 1063-7826
• DOI: 10.1134/s1063782610040214