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Characterization of silicon–carbon alloy materials for future strained Si metal oxide semiconductor field effect transistors

✍ Scribed by Hsieh, B.-F.; Chang, S.T.; Lee, M.H.

Book ID: 118235208
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 835 KB
Volume: 529
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.10.099

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