Characterization of Polymetal Gate Transistors With Low-Temperature Atomic-Layer-Deposition-Grown Oxide Spacer

✍ Scribed by Ga-won Lee; Hi-duck Lee; Kwan-yong Lim; Yong Soo Kim; Hong-sun Yang; Gyu-seog Cho; Sung-kye Park; Sung-joo Hong

• Book ID: 126653902
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 439 KB
• Volume: 30
• Category: Article
• ISSN: 0741-3106
• DOI: 10.1109/LED.2008.2010141