✦ LIBER ✦
Characterization of lanthanum lutetium oxide thin films grown by atomic layer deposition as an alternative gate dielectric
✍ Scribed by M. Roeckerath; T. Heeg; J.M.J. Lopes; J. Schubert; S. Mantl; A. Besmehn; P. Myllymäki; L. Niinistö
- Book ID
- 108290177
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 638 KB
- Volume
- 517
- Category
- Article
- ISSN
- 0040-6090
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