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Characterization of MEMS Devices for the Study of

✍ Scribed by M. González; P. Bhupathi; B. H. Moon; P. Zheng; G. Ling; E. Garcell; H. B. Chan; Y. Lee


Publisher
Springer US
Year
2010
Tongue
English
Weight
520 KB
Volume
162
Category
Article
ISSN
0022-2291

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