Fabrication of microfluidic devices for packaging CMOS MEMS impedance sensors

✍ Scribed by Ling-Sheng Jang; Chun-Ching Wu; Chia-Feng Liu

• Publisher: Springer-Verlag
• Year: 2009
• Tongue: English
• Weight: 379 KB
• Volume: 7
• Category: Article
• ISSN: 1613-4982
• DOI: 10.1007/s10404-009-0484-8