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Parametric study of flip-chip packaging for an MEMS device with diaphragm

✍ Scribed by Cheng-Hsin Chuang; Wen-Hui Li; Shin-Li Lee


Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
587 KB
Volume
17
Category
Article
ISSN
0946-7076

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