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Micromechanical characterization of electroplated permalloy films for MEMS

✍ Scribed by Xueping Li; Guifu Ding; Taeko Ando; Mitsuhiro Shikida; Kazuo Sato

Publisher
Springer-Verlag
Year
2007
Tongue
English
Weight
258 KB
Volume
14
Category
Article
ISSN
0946-7076

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